Title:
CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/225546
Kind Code:
A1
Abstract:
Provided is a technology that provides attenuation while maintaining rigidity of a support member for reducing vibrations of a sample stage, when disturbance such as an environmental sound affects a device and the sample stage is vibrated. A charged particle beam device according to the present disclosure is provided with a sample stage capable of moving a sample, an attenuation part that attenuates vibrations of the sample stage, and a sample chamber that houses the sample stage and the attenuation part. In the charged particle beam device, the sample stage and the attenuation part are disposed horizontally. In addition, the sample stage is configured to be supported so as to be sandwiched between the attenuation part and a first side surface of a housing, and a plurality of friction bodies are filled inside the housing of the attenuation part (fig. 2).
Inventors:
ENOMOTO HIROHISA (JP)
SUZUKI WATARU (JP)
KOYANAGI MUNEKAZU (JP)
HANEDA SHIGERU (JP)
KIKUCHI HIDEKI (JP)
SUZUKI WATARU (JP)
KOYANAGI MUNEKAZU (JP)
HANEDA SHIGERU (JP)
KIKUCHI HIDEKI (JP)
Application Number:
PCT/JP2018/020241
Publication Date:
December 13, 2018
Filing Date:
May 25, 2018
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/20; F16F7/01; F16F15/02; F16F15/04; H01J37/16
Domestic Patent References:
| WO2000016371A1 | 2000-03-23 |
Foreign References:
| JPH0783261A | 1995-03-28 | |||
| JP2002124206A | 2002-04-26 | |||
| JP2002319364A | 2002-10-31 | |||
| JPH0582065A | 1993-04-02 | |||
| JPS53120258A | 1978-10-20 | |||
| JPS524958U | 1977-01-13 | |||
| JP2011021648A | 2011-02-03 | |||
| JP2008147417A | 2008-06-26 | |||
| US5156371A | 1992-10-20 |
Attorney, Agent or Firm:
HIRAKI & ASSOCIATES (JP)
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