CHANNEL FORMING DEVICE

WIPO Patent Application WO/2020/217601

A1

The purpose of the present invention is to provide a channel forming device that, for example, allows a flow control system to be made significantly compact. Provided is a channel forming device (100) with a mounting panel (P1) having a mounting surface that is a surface on which a plurality of pieces of fluid equipment including at least a mass flow controller (M) are mounted, wherein the mounting panel (P1) includes: a plurality of branch channels (L) having a plurality of connection channels (L1) connected to an inlet port or an outlet port of the fluid equipment and a circulation channel (L2) which communicates with the connection channels (L1) and circulates fluids through the fluid equipment; and a merged channel (C) which communicates with the connection channels (L1) of different branch channels (L) and in which fluids flowing through the branch channels (L) are merged. The plurality of branch channels (L) and the merged channel (C) are cavities formed in the mounting panel (P1). The circulation channel (L2) and the merged channel (C) are grade-separated in the mounting panel (P2).

YASUDA TADAHIRO (JP)
PRICE ANDREW (US)
WHITE WILLIAM WYLIE (US)

PCT/JP2020/000936

October 29, 2020

January 15, 2020

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HORIBA STEC CO LTD (JP)

F16K27/00; B33Y80/00; F17D1/04

US5605179A	1997-02-25
JP2016178115A	2016-10-06
JP2013084857A	2013-05-09
JP2000171000A	2000-06-23
JP2015178894A	2015-10-08
JP2011509520A	2011-03-24
JP2012229807A	2012-11-22

NISHIMURA, Ryuhei (JP)

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