Title:
CERAMIC SUSCEPTOR
Document Type and Number:
WIPO Patent Application WO/2022/145668
Kind Code:
A1
Abstract:
The present invention relates to a ceramic susceptor. The ceramic susceptor of the present invention comprises: an insulating plate having a high-frequency electrode disposed therein; a shaft connected to the insulating plate; a connection mount connected to the longitudinal end of the shaft; a first rod and a second rod connected to the high-frequency electrode, passing through the longitudinal end of the shaft, and extending into the connection mount; and a connection member disposed in the connection mount, wherein the connection member connects the first rod and the second rod to each other.
Inventors:
LEE JU SUNG (KR)
BAE HANEUM (KR)
BAE HANEUM (KR)
Application Number:
PCT/KR2021/015160
Publication Date:
July 07, 2022
Filing Date:
October 27, 2021
Export Citation:
Assignee:
MICO CERAM LTD (KR)
International Classes:
H01L21/687; C23C16/458; H01J37/32; H01L21/67; H01L21/683; H05B3/00
Foreign References:
| KR20200136109A | 2020-12-07 | |||
| KR20180121662A | 2018-11-07 | |||
| KR20140038910A | 2014-03-31 | |||
| KR20180034840A | 2018-04-05 | |||
| KR20190074180A | 2019-06-27 |
Attorney, Agent or Firm:
HMP IP GROUP (KR)
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