Title:
CEILING-HUNG SHELF
Document Type and Number:
WIPO Patent Application WO/2020/095571
Kind Code:
A1
Abstract:
A ceiling-hung shelf 6 is hung from a ceiling and is a shelf where front opening unified pods (FOUP) 80 are temporarily placed, the FOUPs 80 being transported to a target position (load port) by a ceiling transport car 3 that transports the FOUPs by travelling along a rail 2 provided to the ceiling of a building. The ceiling-hung shelf 6 comprises an upper shelf which includes an upper support surface for supporting the FOUPs 80. The height of the upper support surface is substantially the same as the height of the rail 2.
Inventors:
TORAZAWA MASAYOSHI (JP)
HAYASHI MASATAKA (JP)
HAYASHI MASATAKA (JP)
Application Number:
PCT/JP2019/038475
Publication Date:
May 14, 2020
Filing Date:
September 30, 2019
Export Citation:
Assignee:
MURATA MACHINERY LTD (JP)
International Classes:
B65G1/04; B65G1/00; B65G1/14; H01L21/677
Domestic Patent References:
| WO2016189975A1 | 2016-12-01 | |||
| WO2011125097A1 | 2011-10-13 |
Foreign References:
| JP2018135199A | 2018-08-30 | |||
| JP2009510776A | 2009-03-12 | |||
| US20110106300A1 | 2011-05-05 | |||
| US20170194181A1 | 2017-07-06 | |||
| JP2001031213A | 2001-02-06 | |||
| JP2017030944A | 2017-02-09 |
Other References:
See also references of EP 3858763A4
Attorney, Agent or Firm:
KATSURAGAWA, Naoki (JP)
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