Title:
BOAT LOADING DEVICE AND WAFER PROCESSING SYSTEM COMPRISING SAME
Document Type and Number:
WIPO Patent Application WO/2024/085399
Kind Code:
A1
Abstract:
A boat loading device is a device that loads a boat loaded with a plurality of wafers before introduction into a process chamber, and comprises: a pair of paddles that support and transport the boat; and a heater, adjacent to the pair of paddles, that heats the boat at a bottom surface of the boat, wherein, after the heater heats the boat to a predetermined temperature, the boat may be introduced into the process chamber.
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| JPH03178778 | VACUUM PINCETTE |
Inventors:
HAN JONG KUK (KR)
KIM YOUNG GI (KR)
KIM MIN HO (KR)
LEE HYUN HO (KR)
PARK SANG TAE (KR)
KIM YOUNG GI (KR)
KIM MIN HO (KR)
LEE HYUN HO (KR)
PARK SANG TAE (KR)
Application Number:
PCT/KR2023/012254
Publication Date:
April 25, 2024
Filing Date:
August 18, 2023
Export Citation:
Assignee:
HANWHA CORP (KR)
International Classes:
H01L21/677; H01L21/67; H01L21/673
Foreign References:
| KR20140145827A | 2014-12-24 | |||
| KR102384690B1 | 2022-04-11 | |||
| KR101334194B1 | 2013-11-28 | |||
| KR101622790B1 | 2016-05-20 | |||
| KR20080057395A | 2008-06-25 | |||
| KR102531704B1 | 2023-05-11 |
Attorney, Agent or Firm:
Y.P.LEE, MOCK & PARTNERS (KR)
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