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Patent Searching and Data


Title:
AUTOMATIC CLEANING APPARATUS FOR CLEANING FILTER, CONTROL SYSTEM, AND CONTROL METHOD
Document Type and Number:
WIPO Patent Application WO/2020/134250
Kind Code:
A1
Abstract:
Disclosed are an automatic cleaning apparatus for cleaning a filter (10), a control system, and a control method, the filter (10) being used for metal organic chemical vapor deposition (MOCVD). The automatic cleaning apparatus comprises: a lye tank (12) holding lye, a clean water tank (14) holding clean water, and a circulating pump (16). The automatic cleaning apparatus has two working states. In the first working state, the lye in the lye tank (12) is filled into the filter (10) by means of the circulating pump (16), and the lye passing though the filter (10) is circulated into the lye tank (12); and in the second working state, the water in the clean water tank (14) is filled into the filter (10) by means of the circulating pump (16), and the water passing through the filter (10) is circulated into the clean water tank (14). The control system comprises a control unit, and a plurality of control valves connected to the control unit, and the plurality of control valves are respectively controlled in different modes so as to enable the automatic cleaning apparatus to be in the first working state or in the second working state. The control method sequentially comprises the following steps: a. a timer defining a first preset time range in which the automatic cleaning apparatus is in the first working state; and b. a timer defining a second preset time range in which the automatic cleaning apparatus is in the second working state.

Inventors:
PU JIAN (CN)
ZHU JIANHAI (CN)
CHEN JUN (CN)
YAO ZHIWEI (CN)
LI BENGONG (CN)
Application Number:
PCT/CN2019/108108
Publication Date:
July 02, 2020
Filing Date:
September 26, 2019
Export Citation:
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Assignee:
FOCUS LIGHTINGS TECH CO LTD (CN)
International Classes:
B01D35/16; B01D29/66; B01D41/00
Foreign References:
CN109432882A2019-03-08
CN209596732U2019-11-08
CN1078167A1993-11-10
CN1676192A2005-10-05
CN205145777U2016-04-13
CN208081993U2018-11-13
US5151186A1992-09-29
Attorney, Agent or Firm:
SUZHOU WISPRO INTELLECTUAL PROPERTY AGENCY (CN)
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