Title:
APPARATUS AND METHOD FOR EXTRACTING ELECTRON MICROSCOPE SAMPLE
Document Type and Number:
WIPO Patent Application WO/2024/050912
Kind Code:
A9
Abstract:
An apparatus and method for extracting an electron microscope sample. The apparatus comprises a body (1), a needle tube (2), and a first pressure adjustment mechanism (3). The body (1) is provided with a first channel (12) and a liquid storage cavity (11), and the first channel (12) is communicated with the liquid storage cavity (11); the needle tube (2) is connected to the body (1) in a sealed manner, and is communicated with the liquid storage cavity (11); the first pressure adjustment mechanism (3) is provided with a first sealing piston (31), the first sealing piston (31) is located in the first channel (12) and is in sealing contact with the inner wall of the first channel (12), and the first sealing piston (31) can move along the first channel (12); when a liquid is stored in the liquid storage cavity (11), the first sealing piston (31) can push the liquid along the first channel (12) to flow in the needle tube (2), a liquid bead (7) protruding out of a liquid outlet (21) is formed at the liquid outlet (21) of the needle tube (2), and an electron microscope sample (6) is adsorbed by means of the liquid bead (7). Therefore, the electron microscope sample (6) is not prone to fall, and the observation efficiency is improved.
Inventors:
WEN ZHIHUI (CN)
Application Number:
PCT/CN2022/124208
Publication Date:
April 18, 2024
Filing Date:
October 09, 2022
Export Citation:
Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
H01L21/683; A61M5/178; H01L21/67
Attorney, Agent or Firm:
BEIJING INTELLEGAL INTELLECTUAL PROPERTY AGENT LTD. (CN)
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