Title:
ALIGNMENT DEVICE AND ACTUATOR
Document Type and Number:
WIPO Patent Application WO/2021/161872
Kind Code:
A1
Abstract:
An alignment device (1) is provided with a plurality of actuators (30). The plurality of actuators (30) support side wall sections (12) of a table member (10) from outside of an opposition area (40) wherein a base member (20) and the table member (10) oppose each other, and are arranged in at least two axial directions (X and Y directions). Each of the plurality of actuators (30) is provided with a first linear motion device (60) and a second linear motion device (80). The first linear motion device (60) guides the table member (10) in a direction following the side wall sections (12). The second linear motion device (80) has a moving body and a driving body, supports the first linear motion device (60), and guides the table member (10) in a perpendicular direction which is orthogonal to the side wall sections (12) among the two axial directions. A gap that allows rotation (movement in θZ direction) of the table member (10) is formed between the moving body and the driving body.
Inventors:
HIROTA JUN (JP)
YAMAMOTO FUYUKI (JP)
YAMAMOTO FUYUKI (JP)
Application Number:
PCT/JP2021/003937
Publication Date:
August 19, 2021
Filing Date:
February 03, 2021
Export Citation:
Assignee:
THK CO LTD (JP)
International Classes:
F16C29/06; B23Q1/48; B23Q1/62; H01L21/68
Domestic Patent References:
| WO2017017988A1 | 2017-02-02 |
Foreign References:
| JPS61230836A | 1986-10-15 | |||
| JPH0825163A | 1996-01-30 | |||
| JPH03117537U | 1991-12-04 |
Attorney, Agent or Firm:
OIKAWA Shu et al. (JP)
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