Title:
AIR-FLOATING GUIDE RAIL TYPE SWITCHABLE RIGID-FLEXIBLE COUPLING MOTION PLATFORM
Document Type and Number:
WIPO Patent Application WO/2022/028260
Kind Code:
A1
Abstract:
An air-floating guide rail type switchable rigid-flexible coupling motion platform, comprising: an air-floating guide rail (1), a rigid-flexible coupling platform (2), a driving component (3), a detection component (4) and a contact switching device (5), wherein the rigid-flexible coupling platform (2) comprises a frame (21), a working platform (22) and a flexible hinge component (23); and the working platform (22) is connected to the frame (21) by means of the flexible hinge assembly (23). When working, a long-stroke motion is realized by means of the air-floating guide rail (1), and nano-level positioning is realized by means of the elastic deformation of a flexible hinge of the rigid-flexible coupling platform (2). When the motion stroke is greater than the maximum deformation of the flexible hinge, the contact switching device (5) controls the frame (21) and the air-floating guide rail (1) such that same are switched to a non-contact state, and the rigid-flexible coupling platform (2) moves freely; and when the error of displacement of the motion platform is less than the maximum deformation of the flexible hinge, the frame (21) and the air-floating guide rail (1) are switched to a contact state, so that the fluctuation, on the air-floating guide rail (1), of the frame (21) of the rigid-flexible coupling platform (2) is eliminated, such that the precision of a nano platform can be achieved.
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Inventors:
YANG ZHIJUN (CN)
HUANG XIAOHONG (CN)
SU LIYUN (CN)
PENG HAO (CN)
HUANG XIAOHONG (CN)
SU LIYUN (CN)
PENG HAO (CN)
Application Number:
PCT/CN2021/108024
Publication Date:
February 10, 2022
Filing Date:
July 23, 2021
Export Citation:
Assignee:
FOSHAN HUADAO SUPER PRECISION TECH CO LTD (CN)
International Classes:
B23Q1/25; F16C32/06; H01L21/67
Foreign References:
| CN112096739A | 2020-12-18 | |||
| CN106002312A | 2016-10-12 | |||
| CN105202028A | 2015-12-30 | |||
| CN103573815A | 2014-02-12 | |||
| CN103836070A | 2014-06-04 | |||
| CN209578822U | 2019-11-05 | |||
| CN110281036A | 2019-09-27 | |||
| CN103062285A | 2013-04-24 | |||
| CN201763815U | 2011-03-16 | |||
| US4569562A | 1986-02-11 |
Attorney, Agent or Firm:
SHENZHEN WINSTON PATENT ATTORNEYS (CN)
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