Title:
AIR-FLOAT CUSHION STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2020/192554
Kind Code:
A1
Abstract:
An air-float cushion structure, comprising an air-float cushion body (30). The air-float cushion body (30) comprises an outlet surface (31), a non-outlet surface (32), and a side surface (33) connecting the outlet surface (31) and the non-outlet surface (32). The side surface (33) of the air-float cushion body (30) is provided with a gas inlet (34). The outlet surface (31) is provided with a first outlet unit (311). The first outlet unit (311) comprises a first orifice (3111), first pressure equalizing slots (3112), first protrusions (3113), and second pressure equalizing slots (3114). The first pressure equalizing slots (3112) are arranged around the first orifice (3111). The first protrusions (3113) are arranged around the first pressure equalizing slots (3112). The second pressure equalizing slots (3114) are arranged around the first protrusions (3113). The problems in an air-float cushion structure of poor dynamic stability or low stiffness and bearing capacity are solved.
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Inventors:
LIU QUWU (CN)
Application Number:
PCT/CN2020/080225
Publication Date:
October 01, 2020
Filing Date:
March 19, 2020
Export Citation:
Assignee:
SHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD (CN)
International Classes:
F16C32/06
Foreign References:
| CN102937141A | 2013-02-20 | |||
| CN105065453A | 2015-11-18 | |||
| CN107269702A | 2017-10-20 | |||
| US4822181A | 1989-04-18 | |||
| JP2002070870A | 2002-03-08 | |||
| US20100322540A1 | 2010-12-23 |
Attorney, Agent or Firm:
BEYOND ATTORNEYS AT LAW (CN)
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