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Title:
AIR BEARING
Document Type and Number:
WIPO Patent Application WO/2022/099944
Kind Code:
A1
Abstract:
An air bearing (100), comprising: an air bearing body (30). The air bearing body (30) is rectangular plate-shaped, and the four corners of the air bearing body (30) are provided with chamfered surfaces (32); a first annular air relief groove (303a) and a second annular air relief groove (303b) are formed on the bottom surface of the air bearing body (30); the first annular air relief groove (303a) is coaxial with the second annular air relief groove (303b) and is spaced radially inward from the second annular air relief groove (303b); an air flotation area (301) is formed between the first annular air relief groove (303a) and the second annular air relief groove (303b); a vacuum preloading area (302) located in the second annular air relief groove is further provided on the bottom surface of the air bearing body (30); each side surface (31) and/or each chamfered surface (32) of the air bearing body (30) is provided with an air relief port (6); multiple air relief channels (304) communicated with the first annular air relief groove (303a) and the second annular air relief groove (303b) are provided in the air bearing body; the multiple air relief channels (304) are respectively communicated with the air relief ports (6). The air bearing is stable in performance, simple in structure, convenient to install and use, and low in processing cost.

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Inventors:
JIANG XUCHU (CN)
YUAN JIAXIN (CN)
WU HUOLIANG (CN)
Application Number:
PCT/CN2021/076322
Publication Date:
May 19, 2022
Filing Date:
February 09, 2021
Export Citation:
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Assignee:
YINGUAN SEMICONDUCTOR TECH CO LTD (CN)
International Classes:
F16C32/06; H01L21/00
Foreign References:
CN112065858A2020-12-11
CN1858653A2006-11-08
CN210344043U2020-04-17
CN102678748A2012-09-19
CN206845691U2018-01-05
CN106438701A2017-02-22
US20050082445A12005-04-21
Attorney, Agent or Firm:
SHANGHAI GOOIP CO., LTD. (CN)
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