Title:
AIR BEARING DEVICE AND COATING DEVICE
Document Type and Number:
WIPO Patent Application WO/2014/024583
Kind Code:
A1
Abstract:
Provided are: an air bearing device that can have increased thickness precision and flatness precision; and a coating device provided with the air bearing device. The air bearing device is characterized by: being provided with a pad section at which floatation is performed by means of a floatation force resulting from the discharge of a gas; and the pad section having a bearing surface, at which jetting openings are provided for discharging gas, and an airflow control means that controls the flow direction of the gas discharged from the jetting openings.
Inventors:
IKEDA TOSHIYUKI (JP)
UEDA SATOSHI (JP)
UEDA SATOSHI (JP)
Application Number:
PCT/JP2013/067076
Publication Date:
February 13, 2014
Filing Date:
June 21, 2013
Export Citation:
Assignee:
OILES INDUSTRY CO LTD (JP)
International Classes:
F16C32/06; B05C5/02; H01L21/027
Foreign References:
| JP2001200843A | 2001-07-27 | |||
| JPH09222124A | 1997-08-26 | |||
| JP2008149238A | 2008-07-03 | |||
| JPS60113816A | 1985-06-20 | |||
| JPS62180114A | 1987-08-07 |
Attorney, Agent or Firm:
KIMIYA, Naoki (JP)
Naoki Kinomiya (JP)
Naoki Kinomiya (JP)
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