Title:
ABRASIVE AGENT AND ABRADING METHOD
Document Type and Number:
WIPO Patent Application WO/2022/172438
Kind Code:
A1
Abstract:
Provided is an abrasive agent for tungsten materials, the abrasive agent comprising abrasive grains, an ammonium salt, an iron-containing compound and an oxidizing agent, in which the abrasive grains have a positive zeta potential and the content of the ammonium salt is 0.01% by mass or more and less than 0.20% by mass relative to the whole mass of the abrasive agent. Also provided is an abrading method, the method comprising abrading a surface of interest with the abrasive agent.
Inventors:
MIZUTANI MAKOTO (JP)
ONO HIROSHI (JP)
INOUE KEISUKE (JP)
JINUSHI TAKAHIRO (JP)
ONO HIROSHI (JP)
INOUE KEISUKE (JP)
JINUSHI TAKAHIRO (JP)
Application Number:
PCT/JP2021/005475
Publication Date:
August 18, 2022
Filing Date:
February 15, 2021
Export Citation:
Assignee:
SHOWA DENKO MATERIALS CO LTD (JP)
International Classes:
C09K3/14; B24B37/00; H01L21/304
Foreign References:
| US20200208014A1 | 2020-07-02 | |||
| JP2009530848A | 2009-08-27 | |||
| JP2020534679A | 2020-11-26 | |||
| JP2017061612A | 2017-03-30 | |||
| JP2000144109A | 2000-05-26 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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