Title:
気化システム
Document Type and Number:
Japanese Patent JP7457522
Kind Code:
B2
Abstract:
To provide a vaporization system capable of suppressing outflow of a liquid material to the outside.SOLUTION: A vaporization system includes an inflow valve for allowing inflow of a liquid material into a tank, an outflow valve for allowing outflow of vaporized gas from the tank, a control part for controlling the inflow valve and the outflow valve, an outflow detection part for detecting outflow of the liquid material from the tank, and a storage part arranged on the furthermore downstream side than the outflow valve, capable of storing at least the liquid material. The control part closes the inflow valve, when detecting outflow of the liquid material from the tank.SELECTED DRAWING: Figure 1
Inventors:
Hidenori Ohba
Akihiro Taguchi
Akihiro Taguchi
Application Number:
JP2020027409A
Publication Date:
March 28, 2024
Filing Date:
February 20, 2020
Export Citation:
Assignee:
HORIBA STEC Co., Ltd.
International Classes:
C23C16/448; B01J7/02; C23C16/52; F17C9/02
Domestic Patent References:
| JP2016122841A | ||||
| JP2016211021A | ||||
| JP2000074891A | ||||
| JP2261531A | ||||
| JP2261530A | ||||
| JP2261529A | ||||
| JP2008262965A | ||||
| JP2112326U |
Foreign References:
| US20180071702 | ||||
| WO2020195349A1 |
Attorney, Agent or Firm:
Patent Attorney Corporation Junias International Patent Office