Title:
A valve, a fluid control apparatus
Document Type and Number:
Japanese Patent JP6011722
Kind Code:
B2
Abstract:
A fluid control apparatus includes a piezoelectric pump and valve. The valve includes a second valve housing, second seal member, diaphragm, first seal member, and first valve housing and has a structure in which they are laminated in sequence. The first valve housing includes a second vent and third vent, has a valve seat, and includes six cavities. The second valve housing has a first vent and first vent and includes a valve seat and six first protrusions. The second valve housing further includes six second protrusions nearer the outer edges than the six first protrusions, as seen in the x-axis direction in plan view.
Inventors:
Kenichiro Kawamura
Takeshi Waku
Sakuratani Yukinori
Takeshi Waku
Sakuratani Yukinori
Application Number:
JP2015518197A
Publication Date:
October 19, 2016
Filing Date:
May 14, 2014
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
F16K7/17; A61B5/0235; F16K15/14; F16K27/00
Domestic Patent References:
| JPH0575558U | 1993-10-15 | |||
| JP2007046721A | 2007-02-22 |
Foreign References:
| WO2012141113A1 | 2012-10-18 | |||
| WO1989005417A1 | 1989-06-15 | |||
| WO2012147477A1 | 2012-11-01 | |||
| WO2010137578A1 | 2010-12-02 |
Attorney, Agent or Firm:
Kaede International Patent Office
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