圧力制御バルブ - KITTS Co., Ltd.

Title:

圧力制御バルブ

Document Type and Number:

Japanese Patent JP7137951

Kind Code:

B2

Abstract:

To provide a pressure control valve in which an exhaust system can be also used for large-diameter piping such as 200A while avoiding complication of a structure, can accurately control slow exhaust and process pressure, can perform high-vacuum exhaust emission by using only the large-diameter piping, and can control pressure even in a flow rate range corresponding to an opening of the large-diameter piping.SOLUTION: A pressure control valve having a structure for controlling an opening of a valve body comprises: a small valve body 3 incorporated into a large-diameter valve body 2 arranged at a valve body 1; springs 4, 5 for bringing the large-diameter valve body and the small valve body into full-closed states for a normal close structure; and a small valve stem 7 connected to an actuator 27 for fully opening the small valve body. The pressure control valve also comprises a stopper 26a for making the small valve body operate the large-diameter valve body in an open direction in a state that the small valve body is fully-opened.SELECTED DRAWING: Figure 1

Inventors:

Toshiaki Iwabuchi

Application Number:

JP2018064150A

Publication Date:

September 15, 2022

Filing Date:

March 29, 2018

Export Citation:

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