Title:
硬質膜の成膜方法および硬質膜
Document Type and Number:
Japanese Patent JP5592625
Kind Code:
B2
Inventors:
Akinari Ohira
Hideyuki Tsutsui
Naoko Ito
Hideyuki Tsutsui
Naoko Ito
Application Number:
JP2009220048A
Publication Date:
September 17, 2014
Filing Date:
September 25, 2009
Export Citation:
Assignee:
NTN Corp.
International Classes:
C23C14/06; C23C14/35
Attorney, Agent or Firm:
Wake 操
Wake Light
Wake Light