Title:
A linear actuator and vacuum control device and a computer program
Document Type and Number:
Japanese Patent JP5993191
Kind Code:
B2
Abstract:
A linear actuator is used with a vacuum chamber in which plasma is generated. The linear actuator comprises a moving member extending between the exterior and the interior of the vacuum chamber through an opening provided in the vacuum chamber so as to be rectilinearly reciprocated, a drive section configured to reciprocate the moving member, a cover that covers the moving member, and a slide seal section that provides a seal between the interior and the exterior of the vacuum chamber while allowing the cover to slide thereon. The cover covers a range of the moving member which is moved into both of the interior and the exterior of the vacuum chamber while the moving member is reciprocated by the drive section, and an outer surface of the cover is smaller in the amount of gas adsorption per unit area than an outer surface of the moving member.
Inventors:
Masayuki Koji
Hiroshi Itato
Hiroshi Itato
Application Number:
JP2012097700A
Publication Date:
September 14, 2016
Filing Date:
April 23, 2012
Export Citation:
Assignee:
CKD Corporation
International Classes:
F15B15/14; F16J13/18; F16K31/122; F16K51/02; G05D16/10; H01L21/3065; H05H1/46
Domestic Patent References:
| JP200530459A | ||||
| JP200968607A | ||||
| JP6101782A | ||||
| JP5118447A | ||||
| JP200342339A |
Attorney, Agent or Firm:
Tsuyoshi Yamada
Hiroshi Matsuda
Hiroshi Matsuda