Title:
流体供給システム
Document Type and Number:
Japanese Patent JP7371955
Kind Code:
B2
Abstract:
A fluid supply system includes: a support body having: a base plate; a side plate provided on one side of the base plate in the longitudinal direction so as to be orthogonal to the base plate; and a top plate provided on one end of the base plate in the height direction so as to be orthogonal to the base plate and the side plate; a process-gas supply unit provided on an outer surface of the top plate; a liquid supply unit provided on an inner surface of the side plate so as to communicate with the process-gas supply unit via a communication-flow-channel forming block; and a purge-gas supply unit provided on an inner surface of base plate so as to communicate with the process-gas supply unit via a communication pipe.
Inventors:
Ryuhei Takazawa
Naoto Tagashira
Teruyuki Funabiki
Masanori Uebayashi
Naoto Tagashira
Teruyuki Funabiki
Masanori Uebayashi
Application Number:
JP2021542046A
Publication Date:
October 31, 2023
Filing Date:
June 24, 2020
Export Citation:
Assignee:
Fujikin Co., Ltd.
International Classes:
H01L21/31; B01J7/00; C23C16/448; H01L21/205; H01L21/3065
Domestic Patent References:
| JP2014114463A | ||||
| JP11267492A | ||||
| JP9047697A |
Foreign References:
| US20130333621 |
Attorney, Agent or Firm:
Patent Attorney Corporation Goto Patent Office
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