Title:
ベント装置
Document Type and Number:
Japanese Patent JP7134856
Kind Code:
B2
Abstract:
To provide a vent device capable of returning to the atmosphere while preventing damage and blow away of things existing in a vacuum case.SOLUTION: A vent device comprises: a vacuum gauge Vg measuring pressure in a vacuum case Lc; a first vent line 2 having a first on-off valve 4 and introducing a small amount of atmosphere open gas; a second vent line 3 having a second on-off valve 5 and introducing a large amount of atmosphere open gas; and a third vent line having a flow regulating valve with a variable passage cross-sectional area through which the atmosphere open gas passes, and after the first on-off valve is opened, when a pressure indication value of the vacuum gauge reaches a first set value, the passage cross-sectional area of the flow regulating valve is gradually increased, and when the pressure indication value of the vacuum gauge reaches a second indication value higher than the first set value before the passage cross-sectional area becomes maximum, the second on-off valve is opened.SELECTED DRAWING: Figure 1
Inventors:
Junsuke Matsuzaki
Application Number:
JP2018233532A
Publication Date:
September 12, 2022
Filing Date:
December 13, 2018
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
G05D16/20; F16K51/02
Domestic Patent References:
| JP59133365A | ||||
| JP6191375A | ||||
| JP2011134183A | ||||
| JP20186513A | ||||
| JP2011134164A |
Attorney, Agent or Firm:
Seiryu Corporation
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