Title:
VAPORIZER AND ION SOURCE INCLUDING THE SAME
Document Type and Number:
Japanese Patent JP2023172015
Kind Code:
A
Abstract:
To provide a vaporizer capable of reducing the waiting time on switching ionic species compared to conventional ones.SOLUTION: A vaporizer 1 includes a solid material 16 containing aluminum, a crucible 2 having a gas inlet 2b into which fluorine-containing gas is introduced and a vapor outlet 2a from which aluminum-containing vapor is released, and a heater 5 that heats the crucible 2.SELECTED DRAWING: Figure 1
Inventors:
HIRAI YUYA
CHO IKO
ITOI SHUN
IWANAMI YUTA
WATANABE HONOKA
CHO IKO
ITOI SHUN
IWANAMI YUTA
WATANABE HONOKA
Application Number:
JP2022083557A
Publication Date:
December 06, 2023
Filing Date:
May 23, 2022
Export Citation:
Assignee:
NISSIN ION EQUIPMENT CO LTD
International Classes:
H01J27/20; H01J37/08; H01J37/317
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