Title:
ボール継手を有するバルブドア
Document Type and Number:
Japanese Patent JP5519099
Kind Code:
B2
Abstract:
Embodiments of an apparatus for sealing a substrate transfer passage in a chamber are provided. In one embodiment, an apparatus for sealing a substrate transfer passage in a chamber includes an elongated door member coupled to an actuator by a ball joint. The ball joint is configured to allow movement of the door member relative to the lever arm around a center of the ball joint. In one embodiment, a sealing face of the elongated door is curved. In another embodiment, the chamber is one of a chemical vapor deposition chamber, a load lock chamber, a metrology chamber, a thermal processing chamber, or a physical vapor disposition chamber, a load lock chamber, a substrate transfer chamber or a vacuum chamber.
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Inventors:
Sam Hyun Sam Kim
Jaet Cully
William N Sterling
Paul Brown
Jaet Cully
William N Sterling
Paul Brown
Application Number:
JP2007166103A
Publication Date:
June 11, 2014
Filing Date:
June 25, 2007
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
B01J3/02; C23C14/56; F16J13/16
Domestic Patent References:
| JP200096941A |
Foreign References:
| US4158367 | ||||
| US20050274923 |
Attorney, Agent or Firm:
Yoshiaki Anzai