Title:
VALVE DEVICE AND CHEMICAL SUPPLY PUMP USING THE SAME
Document Type and Number:
Japanese Patent JP3388045
Kind Code:
B2
Abstract:
PURPOSE: To provide a valve device which can secure certain valve operation for a long time even when it is arranged in a passage through which metal- corrosive liquid such as chemical passes.
CONSTITUTION: In a valve device, a bag part 15 and a valve body 16 are assembled in a valve chamber 14 formed in a housing. The bag part 15 is made of resin film, while gas G such as inactive gas is sealed therein. Elasticity for opening and closing a passage is supplied to the valve body 16 by means of the bag part 15.
Inventors:
Takeo Yajima
Application Number:
JP31635694A
Publication Date:
March 17, 2003
Filing Date:
December 20, 1994
Export Citation:
Assignee:
Koganei Co., Ltd.
International Classes:
F16K25/04; F04B15/02; F04B53/10; F16K15/14; (IPC1-7): F16K15/14; F04B15/02; F04B53/10
Domestic Patent References:
| JP4203569A | ||||
| JP50101931U | ||||
| JP6411871B2 | ||||
| JP511415Y2 |
Attorney, Agent or Firm:
Yamato Tsutsui (2 outside)