Title:
真空バルブ
Document Type and Number:
Japanese Patent JP7106062
Kind Code:
B2
Abstract:
A vacuum valve includes a main flow channel (17) that connects a first port (15) and a second port (16); a main valve seat (19) that surrounds the main flow channel; a main valve disc (20) that opens and closes the main flow channel by contacting and separating from the main valve seat; a sub-flow channel (21) that is formed inside the main valve disc; a sub-valve seat (24) that is formed on an outer surface of the main valve disc; a sub-valve disc (25) that opens and closes the sub-flow channel by contacting and separating from the sub-valve seat at a position outside the main valve disc; and a rod (35) that causes the main valve disc and the sub-valve disc to open and close. The sub-valve disc opens and closes the sub-flow channel by being operated directly by the rod, and the main valve disc opens and closes the main flow channel by being operated via the sub-valve disc by the rod. This vacuum valve has a reduced size and simplified structure.
Inventors:
▲円▼▲崎▼ 明
Application Number:
JP2018119238A
Publication Date:
July 26, 2022
Filing Date:
June 22, 2018
Export Citation:
Assignee:
SMC Corporation
International Classes:
F16K1/44; F16K51/02
Domestic Patent References:
| JP9137879A | ||||
| JP200716996A |
Foreign References:
| US6289932 |
Attorney, Agent or Firm:
Hiroshi Hayashi
Naoki Hayashi
Toru Ishikawa
Naoki Hayashi
Toru Ishikawa
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