Title:
真空弁
Document Type and Number:
Japanese Patent JP7021145
Kind Code:
B2
Abstract:
To provide a vacuum valve capable of adjusting conductance of the vacuum valve by adjusting maximum valve opening of a valve body and capable of equalizing required time for reducing pressure down to predetermined vacuum pressure in a plurality of manufacturing lines.SOLUTION: In a vacuum valve 1 in which a main shaft 11 is driven by a piston 26 having fixed stroke and valve opening operation of a valve body 7 is performed, the main shaft 11 is driven in a valve opening direction only by pressing a pressed section 38a whose position can be adjusted to a driving direction of the piston 26 by a pressing section 26c of the piston 26, and by adjusting the position of the pressed section 38a, a distance between the pressed section 38a and the pressing section 26c in a valve closed state of the valve body 7 can be adjusted and maximum valve opening can be adjusted.SELECTED DRAWING: Figure 1
Inventors:
Naoya Shiroyama
Application Number:
JP2019065201A
Publication Date:
February 16, 2022
Filing Date:
March 29, 2019
Export Citation:
Assignee:
CKD Corporation
International Classes:
F16K31/122; F16K51/02
Domestic Patent References:
| JP2005076829A | ||||
| JP2010007751A |
Attorney, Agent or Firm:
Cosmos International Patent and Trademark Office