Title:
VACUUM VALVE
Document Type and Number:
Japanese Patent JP2023094518
Kind Code:
A
Abstract:
To provide a cost-optimized, easy-to-manufacture vacuum valve that can be connected to other vacuum components in a space-saving manner.SOLUTION: A vacuum valve 10 has a base body 12 and a vacuum opening 16. The vacuum opening 16 is surrounded by a sealing surface 18 for sealing means 24. The sealing surface 18 and the vacuum opening 16 are formed directly on the base body 12. At least one fastening means 26, 28 is formed in the base body 12. The fastening means 26, 28 is used for fastening a vacuum component which is to be connected to the vacuum valve 10 in a vacuum-tight manner.SELECTED DRAWING: Figure 1
Inventors:
SCHWEIGHOEFER MICHAEL
Application Number:
JP2022132383A
Publication Date:
July 05, 2023
Filing Date:
August 23, 2022
Export Citation:
Assignee:
PFEIFFER VACUUM TECH AG
International Classes:
F16K27/00; F16K51/02
Attorney, Agent or Firm:
Mitsufumi Ezaki
Blacksmith Minoru Sawa
Shinsuke Nakamura
Taisei Ishida
Blacksmith Minoru Sawa
Shinsuke Nakamura
Taisei Ishida