Title:
VACUUM VALVE
Document Type and Number:
Japanese Patent JP2002228043
Kind Code:
A
Abstract:
To provide a vacuum valve capable of restricting deformation of a seal ring in a closed state, and protecting the seal ring from corrosive gas.
The vacuum valve comprising a wall body 2 having an opening part (a valve port) 1 and a valve seat 4, and a valve plate 3 is provided with the seal ring 19 and an auxiliary ring 20 more adjacent to the valve port 1 arranged on the valve plate 3 or the valve seat 4. When the valve is closed, sealing force acting to the seal ring 19 is restricted by the auxiliary ring 20 and the seal ring 19 is concealed from treatment gas.
Inventors:
DUELLI BERNHARD
Application Number:
JP2001392850A
Publication Date:
August 14, 2002
Filing Date:
December 25, 2001
Export Citation:
Assignee:
VAT HOLDING AG
International Classes:
F16K25/00; F16K3/02; F16K3/18; F16K51/02; (IPC1-7): F16K51/02; F16K3/02; F16K25/00
Attorney, Agent or Firm:
Tatsuhiko Sato
Previous Patent: MIXING FAUCET
Next Patent: METHOD FOR JOINING EXISTING PIPE AND MATING PIPE BY THREE- DIMENSIONAL MEASUREMENT
Next Patent: METHOD FOR JOINING EXISTING PIPE AND MATING PIPE BY THREE- DIMENSIONAL MEASUREMENT