Title:
温度センサを備えた真空弁
Document Type and Number:
Japanese Patent JP7309621
Kind Code:
B2
Abstract:
Disclosed is a vacuum valve having a valve seat, which has a valve opening, defining an opening axis, and a first sealing surface, a valve closure having a second sealing surface corresponding to the first sealing surface, a drive unit coupled to the valve closure, which can be moved from an open position, in which the valve closure and the valve seat do not contact each other, to a closed position, in which there is a sealing contact between the first sealing surface and the second sealing surface by a seal there between, and the valve opening is sealed gastight as a result. The vacuum valve has at least one temperature sensor, where the temperature sensor is designed and arranged such that, from the temperature sensor, a measurement signal representing thermal information in respect of at least one part of the vacuum valve can be detected.
Inventors:
Adrian Eschen Moser
Andreas Hofer
Andreas Hofer
Application Number:
JP2019566101A
Publication Date:
July 18, 2023
Filing Date:
June 28, 2018
Export Citation:
Assignee:
Bat holding arg
International Classes:
F16K37/00; F16K51/02
Domestic Patent References:
| JP11325315A | ||||
| JP2011102595A |
Foreign References:
| US20120152367 | ||||
| KR1020130084965A | ||||
| US20100282710 | ||||
| US5116023 |
Attorney, Agent or Firm:
Einzel Felix-Reinhard
Taku Morita
Junichi Maekawa
Hiroyasu Ninomiya
Ueshima class
Taku Morita
Junichi Maekawa
Hiroyasu Ninomiya
Ueshima class