Title:
VACUUM VALVE AND ESTIMATION SYSTEM
Document Type and Number:
Japanese Patent JP2022084409
Kind Code:
A
Abstract:
To provide a vacuum valve capable of highly precisely estimating a measurement delay quantity and properly implementing pressure adjustment control.SOLUTION: A vacuum valve 1 includes a valve body 10 interposed between a vacuum pump 4 and vacuum chamber 3, a pressure adjustment control unit 21 that controls a valve body aperture θ of the valve body 10 on the basis of a pressure measurement value Pm of the vacuum chamber 3 measured by a vacuum gauge 31, and an estimation block 210 that estimates a measurement delay time τ_dly of the pressure measurement value representing the pressure of the vacuum chamber on the basis of (a) an expression of exhaust containing a second-order differential term of the pressure measurement value Pm and representing a relationship between an effective exhaust speed Se(θ) of a vacuum exhaust system of the vacuum chamber 3 and the pressure measurement value Pm, and (b) the pressure measurement value Pm measured in the course of pressure response occurring when the valve body aperture θ is varied stepwise. The pressure adjustment control unit 21 controls the valve body aperture θ on the basis of the measurement delay time τ_dly estimated by the estimation block 210.SELECTED DRAWING: Figure 1
More Like This:
| JPH07287619 | SOLENOID VALVE |
| JPS5854711 | 【考案の名称】圧力自動調節装置 |
| WO/2002/004848 | VALVE |
Inventors:
OZAKI JUNICHIRO
Application Number:
JP2020196276A
Publication Date:
June 07, 2022
Filing Date:
November 26, 2020
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
G05D16/20; F16K51/02
Attorney, Agent or Firm:
Yamashita