Title:
磁気軸受システムとバックアップ軸受とセンサとを備えた真空ポンプ
Document Type and Number:
Japanese Patent JP3811769
Kind Code:
B2
Abstract:
A vacuum pump a the magnetic bearing assembly includes the magnetic bearing assembly with rotor position sensors and backup bearings being placed inside the rotatable shaft of the vacuum pump. The sensor placements are independent of the bearing position, so that the respective radial sensors can be at the same axial position as the respective radial bearings, which provides sensors co-location and a space saving within a turbopump housing, in particular, in its axial direction, while sensors and mechanical backup bearings are placed in a better protected area with respect to pumped corrosive gases.
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Inventors:
Casaro, Faust
Meeks, Crawford
Lagar, align
Meeks, Crawford
Lagar, align
Application Number:
JP54595499A
Publication Date:
August 23, 2006
Filing Date:
March 09, 1999
Export Citation:
Assignee:
Varian, Incorporated
International Classes:
F04D19/04; F16C39/02; F16C39/06
Domestic Patent References:
| JP50077913A | ||||
| JP63009495U | ||||
| JP2042194A | ||||
| JP4219496A | ||||
| JP7083188A |
Attorney, Agent or Firm:
Inaoka cultivation
Mio Kawasaki
Mio Kawasaki