バックアップ軸受装置を備えた真空ポンプ

Title:

バックアップ軸受装置を備えた真空ポンプ

Document Type and Number:

Japanese Patent JP3847796

Kind Code:

B2

Abstract:

A vacuum pump has a back-up bearing assembly for allowing its rotor to spin down safely without damaging the pump if the primary bearing system becomes disabled. The drive shaft of the rotor is tubular and contains the back-up bearing assembly in its hollow interior. Back-up bearings are mounted onto a tubular center shaft which is coaxial with and inside the drive shaft. An axial position sensor is nested inside the center shaft and light emitted from its light emitter is reflected by a reflective target inside the drive shaft to detect the relative axial position of the drive shaft with respect to the center shaft. A polymer sleeve is attached to the end of the drive shaft as a thermal compensator, which restricts the axial movement of the drive shaft.

Inventors:

Casaro, Faust
Hawkins, Rally
McMullen, Patrick
Meeks, Crawford
Aurely, dan

Application Number:

JP54595599A

Publication Date:

November 22, 2006

Filing Date:

March 09, 1999

Export Citation:

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