Title:
真空調圧用バルブ
Document Type and Number:
Japanese Patent JP4258806
Kind Code:
B2
Abstract:
A vacuum regulating valve which is simplified in structure and where the flow rate characteristic in evacuating a vacuum vessel is improved, comprises (i) a main valve 1 A of a large size which has: a principal body 4 having two main ports 11, 12 connected to a vacuum vessel 7 and a vacuum pump 8 , respectively, a valve seat 14 disposed in a fluid passage connecting the ports 11, 12 , a valve element 15 seated on and separated from the valve seat 14 , and a shaft 20 extending from the valve element 15 ; and a valve element operating unit 5 for operating the valve element 15 via the shaft 20 , and (ii) a sub valve 2 A of a small size similar in structure to the main valve 1 A. The sub valve 2 A is attached to an outer side surface of a casing 10 of the main valve 1 A.
Inventors:
Kajiya Masao
Application Number:
JP2003310606A
Publication Date:
April 30, 2009
Filing Date:
September 02, 2003
Export Citation:
Assignee:
SMC Corporation
International Classes:
F16K1/44; F16K31/122; F16K31/04; F16K41/10; F16K51/02
Domestic Patent References:
| JP5065969A | ||||
| JP9133238A | ||||
| JP2003083466A | ||||
| JP8152001A | ||||
| JP200166020A | ||||
| JP8270825A | ||||
| JP64035188A | ||||
| JP62028589A | ||||
| JP5118465A | ||||
| JP2002106514A | ||||
| JP2005076829A |
Foreign References:
| US3477466 |
Attorney, Agent or Firm:
Hiroshi Hayashi
Masahiko Goto
Hayashi Naoki
Masahiko Goto
Hayashi Naoki