Title:
真空調圧弁
Document Type and Number:
Japanese Patent JP4110512
Kind Code:
B2
Abstract:
A chamber port to which a vacuum chamber is connected and a pump port to which a vacuum pump is connected are formed on a valve body of a vacuum regulating valve. A valve plug includes a plate and a nose which is connected to the plate by screw members, and closes the chamber port by a pressure fluid. The maximum outer diameter of the nose is smaller than the inner circumferential diameter of the chamber port. The nose is detached through the chamber port.
Inventors:
Kajiya Masao
Application Number:
JP2002116582A
Publication Date:
July 02, 2008
Filing Date:
April 18, 2002
Export Citation:
Assignee:
SMC Corporation
International Classes:
F16K1/52; F16K51/02; F16K41/10
Domestic Patent References:
| JP2002089736A | ||||
| JP11051202A | ||||
| JP2002089737A | ||||
| JP2001263532A | ||||
| JP2017254Y2 | ||||
| JP2001146984A | ||||
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Attorney, Agent or Firm:
Takehiro Chiba
Toshiyuki Miyadera
Toshiyuki Miyadera