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Title:
箔基材の真空熱処理装置、箔基材の熱処理方法
Document Type and Number:
Japanese Patent JP7260459
Kind Code:
B2
Abstract:
The present invention provides: a vacuum heat treatment device for foil base materials, said device being capable of continuously performing a heat treatment on a base material that is formed of a metal foil with high treatment accuracy; and a heat treatment method for foil base materials. A vacuum heat treatment device (1) according to the present invention is provided with: a vacuum chamber; an unwinding shaft (12); a winding shaft (46); at least a pair of front and back heating mechanisms (22); and at least a pair of first cooling mechanisms (23) that are arranged in front and at the back of a base material. A foil base material (W) is carried along a treatment path from the unwinding shaft (12) to the winding shaft (46) in the vacuum chamber. The heating mechanisms (22) are arranged so as to respectively face the front surface and the back surface of the foil base material (W) in the treatment path of the foil base material (W), and heat the foil base material (W). The first cooling mechanisms (23) are arranged so as to respectively face the front surface and the back surface of the foil base material (W) at a position that is closer to the winding shaft (46) than the heating mechanisms (22) in the treatment path, and cool the foil base material (W).

Inventors:
Toshiki Segawa
Akira Ii
Hideyuki Tsumura
Yoshinori Kurokawa
Application Number:
JP2019214402A
Publication Date:
April 18, 2023
Filing Date:
November 27, 2019
Export Citation:
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Assignee:
KABUSHIKI KAISHA KOBE SEIKO SHO
International Classes:
C21D1/773; C21D1/74; C21D9/573; F27B9/04; F27B9/28; F27D7/06
Domestic Patent References:
JP38010009Y1
JP47006011B1
JP59093839A
JP5125539A
JP46027644B1
JP3207811A
JP4060539U
Foreign References:
US20180127851
Attorney, Agent or Firm:
Masataka Kotani
Takashi Gyomu