Title:
VACUUM GATE VALVE
Document Type and Number:
Japanese Patent JPH08210556
Kind Code:
A
Abstract:
PURPOSE: To make a vacuum gate valve small and thin by setting up an actuator making a valve plate operate within the thickness of a manufacturing device or a vacuum vessel under the vacuum in particular.
CONSTITUTION: A vacuum gate valve makes an actuator operating direction 10A of an actuator 10 for rotating a valve plate orthogonal with a valve plate longitudinal direction 3a of this valve plate 3, and in addition, the actuator operating direction 10A is set so as to go along depth direction 1aA of two side walls 1a and 5a of a manufacturing device 5 or vacuum vessel 1.
Inventors:
URYU SHUICHI
Application Number:
JP1944595A
Publication Date:
August 20, 1996
Filing Date:
February 07, 1995
Export Citation:
Assignee:
JAPAN STEEL WORKS LTD
International Classes:
F16K51/02; (IPC1-7): F16K51/02
Attorney, Agent or Firm:
Soga Doteru (6 people outside)