Title:
真空容器の自動開閉機構
Document Type and Number:
Japanese Patent JP5812838
Kind Code:
B2
Inventors:
River Saki Hiroyuki
Takuji Sofukawa
Takuji Sofukawa
Application Number:
JP2011270894A
Publication Date:
November 17, 2015
Filing Date:
December 12, 2011
Export Citation:
Assignee:
Ebara Corporation
International Classes:
F16K24/04; B01J3/02; C23C14/24; F16J3/06; F16J12/00; F16J13/14; F16K31/122; F16K51/02
Domestic Patent References:
| JP6015159A | ||||
| JP6033876A | ||||
| JP2002081572A | ||||
| JP6198160A | ||||
| JP4054381U | ||||
| JP9089139A |
Foreign References:
| US20020027211 |
Attorney, Agent or Firm:
Isamu Watanabe
Ryoji Kosugi
Tetsuya Hirosawa
Ryoji Kosugi
Tetsuya Hirosawa
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