Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
UNIAXIAL CONTROL TYPE SERIAL MULTIPLE-VALVE DEVICE CONTROLLING FLOW OF FLAMMABLE EXPLOSIVE GAS
Document Type and Number:
Japanese Patent JPH06147358
Kind Code:
A
Abstract:

PURPOSE: To concurrently open or close the other valve interlocked with one valve by transmitting the opening/closing force to the other valve provided with a torque adjusting mechanism via a transmission mechanism containing a belt and the like with the handle action of one valve.

CONSTITUTION: A serial multiple-valve device for controlling the flow of the flammable gas used in the semiconductor process is provided with an A-axis valve main body A reciprocating a control valve 4 screwed to a valve screw section 5 through the rotating action of a rotating handle 8 via a valve rod 3 to open or close a valve seat section 10 and a B-axis valve auxiliary body B reciprocating a control valve 15 screwed to a valve screw section 16 through the rotation of a valve rod 14 to open or close a valve seat section 21. The valve opening/closing force of the A-axis valve main body A is transmitted to the B-axis valve auxiliary body B via a transmission mechanism section C wound with a chain 7 across rotary gears 6, 17. The driving torque of the B-axis valve auxiliary body B can be freely adjusted by a torque adjusting mechanism section 19 including a friction plate 18.


Inventors:
SUZUKI KEIJI
Application Number:
JP32087391A
Publication Date:
May 27, 1994
Filing Date:
September 30, 1991
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
TOKURA KOGYO KK
International Classes:
F16K31/44; F16K31/54; (IPC1-7): F16K31/44; F16K31/54
Domestic Patent References:
JPS5725579A1982-02-10
JPS5663361A1981-05-29
JP55092977B