Title:
超純水製造システム及び超純水製造方法
Document Type and Number:
Japanese Patent JP6591211
Kind Code:
B2
Inventors:
Yukio Noguchi
Toru Amaya
Toru Amaya
Application Number:
JP2015118590A
Publication Date:
October 16, 2019
Filing Date:
June 11, 2015
Export Citation:
Assignee:
Nomura Micro Science Co., Ltd.
International Classes:
C02F1/32; B01J39/05; B01J39/18; B01J41/07; B01J41/12; B01J47/04; C02F1/42; G01N31/00
Domestic Patent References:
| JP63032363A | ||||
| JP57150386A | ||||
| JP57152886A | ||||
| JP10123118A | ||||
| JP2012061443A | ||||
| JP2009112941A | ||||
| JP4219664B2 | ||||
| JP8089938A | ||||
| JP2002263643A |
Foreign References:
| WO2009122884A1 |
Attorney, Agent or Firm:
Patent Business Corporation Sakura International Patent Office