Title:
ターボ分子ポンプ
Document Type and Number:
Japanese Patent JP4218765
Kind Code:
B2
Inventors:
Tetsuma Ikegami
Matsutaro Miyamoto
Hiroyuki Kawasaki
Matsutaro Miyamoto
Hiroyuki Kawasaki
Application Number:
JP2006047919A
Publication Date:
February 04, 2009
Filing Date:
February 24, 2006
Export Citation:
Assignee:
Ebara Corporation
International Classes:
F04D19/04
Domestic Patent References:
| JP6040954Y2 | ||||
| JP7008590U | ||||
| JP4342898A | ||||
| JP58009594U | ||||
| JP59035751U | ||||
| JP2042195A | ||||
| JP8338394A | ||||
| JP9072293A | ||||
| JP1219393A | ||||
| JP58172095U | ||||
| JP6004392U | ||||
| JP11280689A | ||||
| JP2003083283A |
Attorney, Agent or Firm:
Isamu Watanabe
Shintaro Hotta
Shintaro Hotta
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