Title:
SURFACE ACOUSTIC WAVE CONVERTER AND METHOD OF FORMING SAME
Document Type and Number:
Japanese Patent JPS5979621
Kind Code:
A
Abstract:
Disclosed is a method for fabricating and structure for a broad band surface acoustic wave (SAW) edge deposited transducer (EDT) (10) capable of frequencies in excess of 1 GHz and bandwidths in the hundreds of MHz. The method and apparatus allows fabrication of such a transducer on a semiconductor substrate (12) which is either non-piezoelectric or weakly piezoelectric. The substrate is formed such as to have a sharp, smooth edge (20) formed by the intersection of its top (18) and a side surface (16). A passivation layer (24) is deposited on the side surface of the substrate followed by a starter layer (34) to provide adhesion and nucleation sites. An inner metallic (gold, for example) electrode (26) is then deposited on the starter layer followed by a transducer layer (40) being deposited on the inner metallic electrode. An outer metallic electrode (36) is then deposited on the transducer layer a predetermined distance below the top surface of the substrate. When the transducer is excited, bulk longituolnal waves are generated in the transducer layer which couple to the longitudinal component of the surface wave in the substrate causing the SAW mode to propagate away from the transducer (10).
Inventors:
ROBAATO SHIERUBII UEIJIYAAZU
Application Number:
JP17446083A
Publication Date:
May 08, 1984
Filing Date:
September 22, 1983
Export Citation:
Assignee:
TEXAS INSTRUMENTS INC
International Classes:
H03H9/145; H03H3/08; (IPC1-7): H03H3/08; H03H9/145
Attorney, Agent or Firm:
Hideto Asamura
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