Title:
【発明の名称】ガラス基板の乾燥装置
Document Type and Number:
Japanese Patent JP2833762
Kind Code:
B2
Inventors:
HASEGAWA MASAHIKO
NAKAMURA MOTOHIKO
NAKAMURA MOTOHIKO
Application Number:
JP23483288A
Publication Date:
December 09, 1998
Filing Date:
September 21, 1988
Export Citation:
Assignee:
SHIBAURA SEISAKUSHO KK
International Classes:
F26B5/08; H01L21/304; (IPC1-7): H01L21/304
Domestic Patent References:
| JP6281718A |
Attorney, Agent or Firm:
Fumio Yamada (1 person outside)