Title:
【発明の名称】気相成長装置
Document Type and Number:
Japanese Patent JP2905126
Kind Code:
B2
Inventors:
MYAZAKI SHINJI
Application Number:
JP25888395A
Publication Date:
June 14, 1999
Filing Date:
October 05, 1995
Export Citation:
Assignee:
TOSHIBA KK
International Classes:
B01J12/02; C23C16/44; H01L21/205; H01L21/285; H01L21/31; (IPC1-7): C23C16/44; B01J12/02; H01L21/205; H01L21/285; H01L21/31
Other References:
ＣＨＥＭＴＲＯＮＩＣＳ，１９８７，ｖｏｌ ２，Ｊｕｎｅ，ｐｐ６２−６８（ｐｐ６３，Ｆｉｇｕｒｅ １及びｐｐ６５，Ｆｉｇｕｒｅ ５）
Ｊ．Ａｐｐｌ．Ｐｈｙｓ．，Ｖｏｌ．５２，ＮＯ．４，Ａｐｒｉｌ １９８１，ｐｐ２７９２−２７９８，ｐｐ２７９２，ＦＩＧ．１
Ｊ．Ａｐｐｌ．Ｐｈｙｓ．，Ｖｏｌ．５２，ＮＯ．４，Ａｐｒｉｌ １９８１，ｐｐ２７９２−２７９８，ｐｐ２７９２，ＦＩＧ．１
Attorney, Agent or Firm:
Hidekazu Miyoshi (3 outside)