Title:
【発明の名称】マイクロ弁
Document Type and Number:
Japanese Patent JP2002514716
Kind Code:
A
Abstract:
The valve seat is located between an inlet opening and an outlet opening, with a connecting stub against which an elastic membrane presses. The membrane is disposed above a cavity and formed by a part of a polysilicon layer. When a medium flows onto the side of the membrane facing the connecting stub, the membrane is lifted off the connecting stub and is pulled into the cavity, so that the medium can flow through the valve. The membrane can be stiffened by a stamp-like attachment, in order to ensure that the valve opens uniformly.
Inventors:
Christopher Herolt
Application Number:
JP2000548612A
Publication Date:
May 21, 2002
Filing Date:
May 06, 1999
Export Citation:
Assignee:
Infineon Technologies Actien Gezel Shaft
International Classes:
B81B3/00; F02M51/06; F02M61/04; F02M61/16; F02M61/18; F15C5/00; F16K7/14; F16K31/02; F16K99/00; (IPC1-7): F16K7/14; B81B3/00; F02M51/06; F02M61/04; F16K31/02
Attorney, Agent or Firm:
Takashi Honda