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Title:
【発明の名称】ジクロルシランの製造方法
Document Type and Number:
Japanese Patent JP2519080
Kind Code:
B2
More Like This:
JP2010155761METHOD OF PRODUCING MICRO SILICON CARBIDE, MICRO SILICON NITRIDE, METAL SILICON AND SILICON CHLORIDE
Inventors:
IJUIN KAZUO
TAKEGUCHI MASAKATSU
KIRII SEIICHI
UBUKAWA MITSUTOSHI
Application Number:
JP5153188A
Publication Date:
July 31, 1996
Filing Date:
March 07, 1988
Export Citation:
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Assignee:
KOJUNDO SHIRIKON KK
International Classes:
C01B33/107; (IPC1-7): C01B33/107
Domestic Patent References:
JP59107917A
JP4840625A
Attorney, Agent or Firm:
Chiba Hiroshi



 
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