Title:
TEMPERATURE PATTERN MEASUREMENT
Document Type and Number:
Japanese Patent JPS51141677
Kind Code:
A
Abstract:
PURPOSE: To know the absolute temperature an inspecting object in comparison of its temperature pattern with the standard temperature pattern.
Inventors:
MORIKAWA TERUO
Application Number:
JP6629075A
Publication Date:
December 06, 1976
Filing Date:
May 31, 1975
Export Citation:
Assignee:
CANON KK
International Classes:
G01J5/48; G01J5/00; (IPC1-7): G01J5/18
Domestic Patent References:
| JPS5151383A | 1976-05-06 |