Title:
超高純度（ＵＨＰ）二酸化炭素浄化のためのシステム及び方法
Document Type and Number:
Japanese Patent JP6450405
Kind Code:
B2
Abstract:
An Ultra High Purity (UHP) carbon dioxide purification system and a method for purification of UHP carbon dioxide is disclosed. The purification system includes supported nickel oxide and supported palladium oxide. An upper portion of the purification system is at least partially filled with supported nickel oxide, and a lower portion of the purification system is at least partially filled with supported palladium oxide. The upper and lower portions of the purification system have a physical separation but are in fluid communication. The method includes purification or pre-purification of High Purity (HP) carbon dioxide to Ultra High Purity (UHP) levels including feeding carbon dioxide of High Purity grade or better to an Ultra High Purity carbon dioxide purification system.
Inventors:
Marco Switch
Christian Landni
Sarah Voggt
Charles H. Applegarth
Christian Landni
Sarah Voggt
Charles H. Applegarth
Application Number:
JP2016574514A
Publication Date:
January 09, 2019
Filing Date:
March 05, 2015
Export Citation:
Assignee:
SAES PURE GAS INCORPORATED
International Classes:
C01B32/50
Domestic Patent References:
| JP2006502957A | ||||
| JP2013087017A | ||||
| JP2005517623A | ||||
| JP2014180667A |
Foreign References:
| CN1970133A | ||||
| WO2010129413A1 | ||||
| US20110165046 | ||||
| US20030143129 |
Attorney, Agent or Firm:
Yasuhiko Murayama
Shinya Mitsuhiro
Tatsuhiko Abe
Shinya Mitsuhiro
Tatsuhiko Abe