Title:
支持装置、リソグラフィ装置及びデバイス製造方法
Document Type and Number:
Japanese Patent JP6554445
Kind Code:
B2
Abstract:
A support apparatus for a lithographic apparatus has an object holder and an extraction body radially outward of the object holder. The object holder is configured to support an object. The extraction body includes an extraction opening configured to extract fluid from a top surface of the support apparatus. The extraction body is spaced from the object holder such that the extraction body is substantially decoupled from the object holder. The extraction body comprises a projection configured such that it surrounds the object holder and such that, in use, a layer of liquid is retained on the projection and in contact with an object supported on the object holder.
Inventors:
Rafare, Raymond, Wilhelms, Lewis
Koevots, Adrianus, Hendrick
Dondels, Soheld, Nicolas, Lambertus
Fien, Menno
De Grote, Antonius, Franciscus, Johannes
Hogendam, christian, alexander
Jacobs, Johannes, Henrykas, Wilhelms
Ten Kate, Nikolaas
Houben, Martin
Vesteraken, Jean, Stephen, Christiaan
Overcomp, Jim, Vincent
Van Bynum, Maarten
Koevots, Adrianus, Hendrick
Dondels, Soheld, Nicolas, Lambertus
Fien, Menno
De Grote, Antonius, Franciscus, Johannes
Hogendam, christian, alexander
Jacobs, Johannes, Henrykas, Wilhelms
Ten Kate, Nikolaas
Houben, Martin
Vesteraken, Jean, Stephen, Christiaan
Overcomp, Jim, Vincent
Van Bynum, Maarten
Application Number:
JP2016138497A
Publication Date:
July 31, 2019
Filing Date:
July 13, 2016
Export Citation:
Assignee:
AS M Netherlands B.V.
International Classes:
G03F7/20; H01L21/683
Domestic Patent References:
| JP2007266504A | ||||
| JP2010251745A | ||||
| JP2010212713A | ||||
| JP2010267961A | ||||
| JP2010251745A | ||||
| JP200654427A | ||||
| JP2010212713A | ||||
| JP201034227A | ||||
| JP2009295978A | ||||
| JP2007266603A | ||||
| JP2010267961A |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito