Title:
SUCTION PAD
Document Type and Number:
Japanese Patent JP3917528
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To prevent a vacuum destruction of a suction pad supporting a glass substrate by vacuum suction.
SOLUTION: The suction pad 1 comprises: a pad 2 provided with a supporting surface 22 to suck the lower surface W1 of the substrate W with vacuum, and a cylindrical part 23 to be supported; a supporting case 3 to support the cylindrical part 23, packing 4; and the like. The lower end 23a of curved surface of the cylindrical part 23 is supported movably in a lateral direction X with the plane surface 31 of the supporting case 3, and at the same time, the cylindrical part 23 is restrained from large displacement with an inner ring 32. Further, the inclination of the pad is restrained with a space between the ring surface 24 of the pad and the upper end surface 33. The packing 4 seals a vacuum side 34b from an open air side 34a so that the packing 4 may not hinder the pad from moving. When the suction supporting surface of the pad is pulled by the heat-contracted substrate, the pad is moved in that direction. As a result, the supporting surface and substrate are not separated, and the vacuum destruction is surely prevented.
Inventors:
Akira Fukushima
Toshiro Kanda
Yoshihiko Otani
Toshiro Kanda
Yoshihiko Otani
Application Number:
JP2003001399A
Publication Date:
May 23, 2007
Filing Date:
January 07, 2003
Export Citation:
Assignee:
ESPEC CORPORATION
International Classes:
B25J15/06; B65G47/91; B65G49/06; B65G49/07; B65H3/08; F16B47/00; H01L21/677; H01L21/68; (IPC1-7): B25J15/06; B65G49/06; H01L21/68
Domestic Patent References:
| JP63136636U |
Attorney, Agent or Firm:
Kenji Kageyama