Title:
STAGE DEVICE
Document Type and Number:
Japanese Patent JP3555164
Kind Code:
B2
Abstract:
PURPOSE: To adjust the viscous resistance acting on a movable stage to an appropriate value.
CONSTITUTION: A protruding piece disposed at the lower face of a movable stage 2 is vertically moved by a viscous resistance adjusting means 11. Viscous resistance caused to the movable stage 2 is adjusted by the contact quantity of the protruding piece 11B and a viscous fluid 12 increased/decreased by the vertical movement of the protruding piece 11B so as to be able to adjust the damping quantity to the appropriate value. As a result, the movable stage 2 can be positioned into a specified position without conducting a hunting action.
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Inventors:
Tetsuji Hanasaki
Tomohide Hamada
Kazuaki Saeki
Tomohide Hamada
Kazuaki Saeki
Application Number:
JP5488894A
Publication Date:
August 18, 2004
Filing Date:
March 01, 1994
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
B23Q15/24; B23Q1/00; B23Q1/38; B23Q1/58; B23Q11/00; F16D57/02; G03F7/20; H01L21/027; H01L21/68; (IPC1-7): B23Q1/58; F16D57/02; H01L21/027
Domestic Patent References:
| JP3075803A | ||||
| JP4157232A | ||||
| JP3189236A |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Takashi Watanabe
Masakazu Aoyama
Kazuya Nishi
Yasuhiko Murayama
Tadashi Takahashi
Takashi Watanabe
Masakazu Aoyama
Kazuya Nishi
Yasuhiko Murayama
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