SPRAY NOZZLE VALVE FOR MANUFACTURE OF THIN FILM

Japanese Patent JP3825517

B2

PROBLEM TO BE SOLVED: To perform continuous spraying even if dust is put into a gap by forming a fluid outlet to be an opening having a reverse conical inner peripheral surface, inserting a reverse conical valve body into the inner peripheral surface of this fluid outlet so as to be separated and jetting out high pressure fluids through a gap formed like a ring in section.
SOLUTION: When a handle 12 is rotated in a valve opening direction, a slide stem 10 is raised, and a disk tip part 6a (valve body) is moved away from the inner peripheral surface 16a (valve seat) of a fluid outlet 16 and thereby a spray nozzle valve is opened. A fluid A pressed into a gap through a fluid supply route 15 is passed through a ring-like gap between the valve body 6a and the valve seat 16a to reach the fluid outlet 16, then the fluid becomes fine liquid drops and sprayed into a vacuum container. In this case, since the fluid outlet 16 is formed like a ring, if trash or the like is put into the middle of the gap, the closing of the entire ring-like fluid outlet 16 is prevented and the fluid A is jetted out through a remaining opening section.

Takashi Hiraga
Moriya Tetsuro
Kazuhiro Yoshikawa
Makino Megumi

JP33734996A

September 27, 2006

December 17, 1996

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National Institute of Advanced Industrial Science and Technology
Fujikin Co., Ltd.

B05B1/32; F16K21/02; F16K1/34; F16K31/50; (IPC1-7): F16K21/02; B05B1/32; F16K31/50

JP7252670A
JP7080360A
JP7083338A
JP8036184A
JP8114265A
JP7252671A
JP2009702A
JP5147592A
JP7190214A
JP5079570A
JP7002218B2
JP5039667B2
JP52052939Y1
JP4056327U

Takeshi Sugimoto

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